New Spin-On Hardmask Technology Improves Functionality in Semiconductor Industry
BALTIMORE – Pixelligent and Brewer Science Inc. announced the development of a new spin-on hardmask technology. Pixelligent, an innovator in manufacturing nanocrystal additives for the electronics, industrial and military markets, and Brewer Science, a global technology leader in the microelectronics industry, have brought together their nanocrystal and microelectronic coating technologies to create a next-generation spin-on hardmask for advanced lithography.
The hardmask incorporates Pixelligent’s leading-edge nanocrystal and dispersion technologies with Brewer Science’s industry-leading polymer technology. The result is a hardmask that dramatically improves the process window, while at the same time significantly reduces line collapse, improves etch selectivity, and offers broad resist compatibility. This product is the result of two years of intense collaboration between Pixelligent Technologies and Brewer Science, with significant support from NIST under an $8 million Technology Innovation Program award.