When King Polytechnic Engineering Co. Ltd. (KPEC), a major optoelectronics and semiconductor equipment manufacturer, wanted to replace the PTFE coating on its medium- to large-sized spin/dip coating equipment, it switched to VICOTE® Coating based on VICTREX® PEEK™ polymer. The new coatings substantially reduced maintenance requirements.
When King Polytechnic Engineering Co. Ltd. (KPEC), a major optoelectronics and semiconductor equipment manufacturer, wanted to replace the PTFE coating on its medium- to large-sized spin/dip coating equipment, it switched to VICOTE® Coating based on VICTREX® PEEK™ polymer.
According to Frank Huang, plant manager of KPEC Clean Room Division, “When the PTFE coating was placed in an extreme environment with highly acidic/basic chemicals and high temperatures, it stripped off easily after the thermocycle of developing, etching, and stripping. This resulted in frequent maintenance of the spin coating part. However, since we switched to the VICOTE Coating, we have not received any maintenance requests,” said Huang.
The most crucial and difficult step in the manufacturing process of semiconductors and LCDs is photolithography. Only through the SPIN/DIP process can the stripper, etching and developing solution be completely fabricated on the wafer and the glass substrate. This is done in the most extreme environment involving highly acidic/basic chemicals and high temperature where the equipment’s stability and uniformity can directly affect the yield of wafers and LCD panels.
According to Gary Li, Country Manager of Victrex Taiwan, “The VICOTE Coating helps reduce the particle generation of spin coater during the developing, etching, and stripping processes. This not only extends the equipment lifespan and reduces the need for maintenance, it also significantly enhances the production efficiency and yield of wafers and LCD panels.”
“Because the VICOTE coating has exceptional abrasion resistance, bonding strength on substrate and chemical resistance,” explained Li, “It can significantly lower the particle generation and withstand most chemical substances. Applying it on the key components of processing equipment can help extend the equipment’s lifespan and reduce the need for maintenance, thus enhancing the production efficiency and yield of wafer and LCD panels for end users. KPEC currently uses the VICOTE Coating on its medium- to large-sized SPIN/DIP equipment series for wafers and LCD panels that are 8 in or larger.”
Commenting on the increasing demands of the semiconductor industry, Li said “With the advances toward larger wafer size and higher precision, and an environment involving stronger chemicals and higher temperatures, the introduction of advanced materials and processing techniques becomes key to the industry’s development.”
For more information, visit www.vicote.com.
Coating Reduces Spin/Dip Equipment Maintenance - Posted 6/10/08
June 10, 2008